Since the first scanning probe microscope was constructed in the 1980s, a number of various near-field methods have been developed to investigate the nanoworld in terms of its diverse properties. Among them, there is scanning thermal microscopy (SThM), designed for simultaneous atomic-scale imaging of surface topography with temperature or thermal conductivity. This chapter briefly introduces several scanning probe microscopy methods, which serve as well-established ways to investigate the nanoscale world. We put emphasis on SThM, interest in which has recently increased, mostly because the thermal effects are becoming more and more significant in the shrinking nanoelectronic devices. We also describe the history of SThM-related techniques, show their most recent applications, and point out the challenges that need to be faced in order to move forward.
Wielgoszewski, G., & Gotszalk, T. (2015). Chapter Four-Scanning Thermal Microscopy (SThM): How to Map Temperature and Thermal Properties at the Nanoscale. Advances in Imaging and Electron Physics, 190, 177-221.